In-Situ Calibration and De-Embedding Test Structure Design for SiGe HBT On-Wafer Characterization up to 500 GHz

In this paper, we present an in-situ thru-reflect-line (TRL) calibration and de-embedding kit that sets the reference plane in close proximity to the device under test. This is made possible thanks to the realization of the standards at the metal3 BEOL level, instead of the common meta1-8 solution. This novel calibration kit has been compared to classic TRL, both for parasitics assessment and by direct application on the active device (HBT) measurements.