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Transport-of-intensity-based phase imaging to quantify the refractive index response of 3D direct-write lithography
- Source :
- Optics express. 26(2)
- Publication Year :
- 2018
-
Abstract
- Precise direct-write lithography of 3D waveguides or diffractive structures within the volume of a photosensitive material is hindered by the lack of metrology that can yield predictive models for the micron-scale refractive index profile in response to a range of exposure conditions. We apply the transport of intensity equation in conjunction with confocal reflection microscopy to capture the complete spatial frequency spectrum of isolated 10 μm-scale gradient-refractive index structures written by single-photon direct-write laser lithography. The model material, a high-performance two-component photopolymer, is found to be linear, integrating, and described by a single master dose response function. The sharp saturation of this function is used to demonstrate nearly binary, flat-topped waveguide profiles in response to a Gaussian focus.
- Subjects :
- Materials science
business.industry
Physics::Optics
02 engineering and technology
Refractive index profile
021001 nanoscience & nanotechnology
01 natural sciences
Atomic and Molecular Physics, and Optics
law.invention
Metrology
010309 optics
Optics
law
0103 physical sciences
Microscopy
Spatial frequency
0210 nano-technology
business
Waveguide
Lithography
Refractive index
Maskless lithography
Subjects
Details
- ISSN :
- 10944087
- Volume :
- 26
- Issue :
- 2
- Database :
- OpenAIRE
- Journal :
- Optics express
- Accession number :
- edsair.doi.dedup.....2894a6c88708dd525c99e7a1c0b6f401