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Surface micromachined linear electrostatic stepper motor
- Source :
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 215-220, STARTPAGE=215;ENDPAGE=220;TITLE=Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
- Publication Year :
- 1997
-
Abstract
- A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8/spl plusmn/0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 /spl mu/m, with steps in the order of 2 /spl mu/m. The deflection is limited by the suspension. The generated force equals 3 /spl mu/N at 40 V driving voltage.
Details
- Database :
- OpenAIRE
- Journal :
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 215-220, STARTPAGE=215;ENDPAGE=220;TITLE=Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi.dedup.....27c96c07629f3c6bf415d3e06836a3b4
- Full Text :
- https://doi.org/10.1109/memsys.1997.581806