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Evaporation of Ti/Cr/Ti Multilayer on Flexible Polyimide and Its Application for Strain Sensor
- Source :
- Micromachines, Volume 12, Issue 4, Micromachines, Vol 12, Iss 456, p 456 (2021)
- Publication Year :
- 2021
- Publisher :
- MDPI, 2021.
-
Abstract
- A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge show that adding Cr interlayer can improve the recovery and stability of the sensing electrode. When the interlayer Cr thickness was increased from 0 to 70 nm, the resistance decreased from 27 to 8.8 kΩ. The gauge factor (GF) value also decreased from 4.24 to 2.31 with the increase in the thickness of Cr interlayer from 30 to 70 nm, and the hysteresis phenomenon disappeared gradually. The multilayer Ti/Cr/Ti film has feasible application for strain sensor.
- Subjects :
- Materials science
Strain (chemistry)
Mechanical Engineering
Evaporation (deposition)
polyimide
Article
evaporation
Metal
Control and Systems Engineering
Gauge factor
visual_art
Electrode
TJ1-1570
visual_art.visual_art_medium
Ti/Cr/Ti multilayer
strain gauge
Mechanical engineering and machinery
Electrical and Electronic Engineering
Composite material
Polyimide
Strain gauge
Tensile testing
Subjects
Details
- Language :
- English
- ISSN :
- 2072666X
- Volume :
- 12
- Issue :
- 4
- Database :
- OpenAIRE
- Journal :
- Micromachines
- Accession number :
- edsair.doi.dedup.....278c744dca34ef125d914081635e8d44