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Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency
- Source :
- Applied physics letters 98 (2011). doi:10.1063/1.3551725, info:cnr-pdr/source/autori:Massaro A; De Guido S; Ingrosso I; Cingolani R; De Vittorio M; Cori M; Bertacchini A; Larcher L; Passaseo A/titolo:Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency/doi:10.1063%2F1.3551725/rivista:Applied physics letters/anno:2011/pagina_da:/pagina_a:/intervallo_pagine:/volume:98
- Publication Year :
- 2011
- Publisher :
- American Institute of Physics., New York [etc.], Stati Uniti d'America, 2011.
-
Abstract
- Energy harvesting at low frequency is a challenge for microelectromechanical systems. In this work we present a piezoelectric vibration energy harvester based on freestanding molybdenum (Mo) and aluminum nitride (AlN) ring-microelectromechanical-system (RMEMS) resonators. The freestanding ring layout has high energy efficiency due to the additional torsional modes which are absent in planar cantilevers systems. The realized RMEMS prototypes show very low resonance frequencies without adding proof masses, providing the record high power density of 30.20 μW mm−3 at 64 Hz with an acceleration of 2g. The power density refers to the volume of the vibrating RMEMS layout.
- Subjects :
- Microelectromechanical systems
Cantilever
Materials science
Physics and Astronomy (miscellaneous)
business.industry
Energy harvesting
Resonance
Piezoelectric rings
Piezoelectricity
aluminium compounds
cantilevers
crystal resonators
energy harvesting
micromechanical resonators
molybdenum
vibrations
Vibration
Resonator
Optoelectronics
business
Power density
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Applied physics letters 98 (2011). doi:10.1063/1.3551725, info:cnr-pdr/source/autori:Massaro A; De Guido S; Ingrosso I; Cingolani R; De Vittorio M; Cori M; Bertacchini A; Larcher L; Passaseo A/titolo:Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency/doi:10.1063%2F1.3551725/rivista:Applied physics letters/anno:2011/pagina_da:/pagina_a:/intervallo_pagine:/volume:98
- Accession number :
- edsair.doi.dedup.....24eda1ed24e4a33a2b07bf9e37681586