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Design of an optimized grating coupler for thick SOI rib waveguides
- Publication Year :
- 2011
-
Abstract
- The use of grating couplers for fiber to chip coupling is a promising technique, allowing wafer scale testing with no need for facet preparation. Albeit grating couplers have been extensively studied for Si-wire waveguides, the implementation on SOI micrometric rib waveguides remains challenging, mainly due to excitation of higher order modes. In this work we show for the first time that monomode excitation of the grating can be achieved by properly designing the access waveguide. With the proposed approach the circuit can be fabricated using standard i-line stepper litography with a single etch step. The optimized design for a 1.5m thick silicon layer achieves a simulated coupling efficiency of 65.6% at 1.55m. Preliminary experimental results yield a coupler loss of 4dB. © 2011 IEEE.<br />2011 ICO International Conference on Information Photonics, IP 2011, 18 May 2011 through 20 May 2011, Ottawa, ON
- Subjects :
- thick SOI
Materials science
silicon layer
photonics
Silicon on insulator
Grating
optimized designs
Waveguide (optics)
law.invention
Optics
wafer scale
Si wire waveguide
law
Etching (microfabrication)
chip coupling
Blazed grating
Wafer
Stepper
Diffraction grating
I-line steppers
business.industry
silicon wafers
grating couplers
coupling efficiency
waveguides
rib waveguides
business
single etch
optimization
higher-order modes
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....235f0f47ace593e36497fb7549287e79