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Effect of surface roughness on EPES and AREPES measurements: Flat and crenels silicon surfaces
- Source :
- Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2008, 602 (12), pp.2114-2120. ⟨10.1016/j.susc.2008.04.020⟩, Surface Science, Surface Science, Elsevier, 2008, 602 (12), pp.2114-2120. ⟨10.1016/j.susc.2008.04.020⟩
- Publication Year :
- 2008
- Publisher :
- HAL CCSD, 2008.
-
Abstract
- EPES (elastic peak electron spectroscopy) and AREPES (angle resolved elastic peak electron spectroscopy) are non destructive methods and very sensitive to the surface region. These techniques allow to measure the percentage η e of elastically backscattered electrons from the surface excited by an electron beam. Both methods are combined with Monte-Carlo (MC) simulations to interpret experimental results. In this work, we underline the importance of a micrometric scale roughness at the surface. The use of an original Monte-Carlo method was fruitful for the simulation, moreover 3D representations have been developed for visualization and qualitative interpretation of the results. For a more precise quantitative study, a 2D representation was necessary. The calculated results have been compared with published experimental ones got for different incidence angles and primary energies, on a silicon surface having triangular saw-tooth aspect (crenels) obtained by photolithography. We have observed that the effect due to the roughness increases with the incidence angle.
- Subjects :
- Surface (mathematics)
Materials science
Silicon
chemistry.chemical_element
02 engineering and technology
Electron
Surface finish
01 natural sciences
Electron spectroscopy
Molecular physics
Optics
0103 physical sciences
Materials Chemistry
Surface roughness
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
ComputingMilieux_MISCELLANEOUS
010302 applied physics
business.industry
Surfaces and Interfaces
021001 nanoscience & nanotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
chemistry
Excited state
Cathode ray
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
0210 nano-technology
business
Subjects
Details
- Language :
- English
- ISSN :
- 00396028 and 18792758
- Database :
- OpenAIRE
- Journal :
- Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2008, 602 (12), pp.2114-2120. ⟨10.1016/j.susc.2008.04.020⟩, Surface Science, Surface Science, Elsevier, 2008, 602 (12), pp.2114-2120. ⟨10.1016/j.susc.2008.04.020⟩
- Accession number :
- edsair.doi.dedup.....20b892a2daf59d1b928a8c59a83480da