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Black Silicon by ICP-RIE and its prospects in photovoltaics

Authors :
Matthias Zilk
Thomas Käsebier
Andreas Tünnermann
Martin Steglich
Ernst-Bernhard Kley
Source :
Scopus-Elsevier
Publication Year :
2014
Publisher :
OSA, 2014.

Abstract

Black Silicon fabricated by ICP-RIE is presented as light-trapping structure for silicon-based photovoltaics. Its fabrication and optical properties (vanishing interface reflectance and increased NIR absorptance) is discussed.

Subjects

Subjects :
Materials science
Fabrication
Silicon
Hybrid silicon laser
business.industry
Black silicon
chemistry.chemical_element
chemistry.chemical_compound
Atomic layer deposition
chemistry
Photovoltaics
Absorptance
Optoelectronics
business
Diffraction grating

Details

Database :
OpenAIRE
Journal :
Light, Energy and the Environment
Accession number :
edsair.doi.dedup.....1e57332326c73cdda6df718d5078a7ef

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