Back to Search
Start Over
A cleanroom in a glovebox
- Source :
- Review of Scientific Instruments. 91:073909
- Publication Year :
- 2020
- Publisher :
- AIP Publishing, 2020.
-
Abstract
- The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.
- Subjects :
- 010302 applied physics
Inert
Fabrication
Argon
Materials science
business.industry
Interface (computing)
FOS: Physical sciences
chemistry.chemical_element
Physics - Applied Physics
Applied Physics (physics.app-ph)
01 natural sciences
Antechamber
010305 fluids & plasmas
Characterization (materials science)
Condensed Matter - Other Condensed Matter
Glovebox
chemistry
Cleanroom
0103 physical sciences
Process engineering
business
Instrumentation
Other Condensed Matter (cond-mat.other)
Subjects
Details
- ISSN :
- 10897623 and 00346748
- Volume :
- 91
- Database :
- OpenAIRE
- Journal :
- Review of Scientific Instruments
- Accession number :
- edsair.doi.dedup.....1d9cb8bdb858c2f97c69d90e369b640d
- Full Text :
- https://doi.org/10.1063/5.0006462