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A cleanroom in a glovebox

Authors :
Gavin B. Osterhoudt
Xi Ling
Yiping Wang
Vincent Plisson
Ilija Zeljkovic
Ryan O'Connor
Mason Gray
Ruidan Zhong
Kenneth S. Burch
He Zhao
Hikari Kitadai
Marcel Hoek
Genda Gu
Erin Sheridan
Meaghan C. Doyle
Bryan Rachmilowitz
Steven Shepard
Marisa L. Romanelli
Shiming Lei
Narendra Kumar
Leslie M. Schoop
Source :
Review of Scientific Instruments. 91:073909
Publication Year :
2020
Publisher :
AIP Publishing, 2020.

Abstract

The exploration of new materials, novel quantum phases, and devices requires ways to prepare cleaner samples with smaller feature sizes. Initially, this meant the use of a cleanroom that limits the amount and size of dust particles. However, many materials are highly sensitive to oxygen and water in the air. Furthermore, the ever-increasing demand for a quantum workforce, trained and able to use the equipment for creating and characterizing materials, calls for a dramatic reduction in the cost to create and operate such facilities. To this end, we present our cleanroom-in-a-glovebox, a system that allows for the fabrication and characterization of devices in an inert argon atmosphere. We demonstrate the ability to perform a wide range of characterization as well as fabrication steps, without the need for a dedicated room, all in an argon environment. Finally, we discuss the custom-built antechamber attached to the back of the glovebox. This antechamber allows the glovebox to interface with ultra-high vacuum equipment such as molecular-beam epitaxy and scanning tunneling microscopy.

Details

ISSN :
10897623 and 00346748
Volume :
91
Database :
OpenAIRE
Journal :
Review of Scientific Instruments
Accession number :
edsair.doi.dedup.....1d9cb8bdb858c2f97c69d90e369b640d
Full Text :
https://doi.org/10.1063/5.0006462