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Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens

Authors :
Chao-Fu Yang
Shong-Leih Lee
Source :
Optics Express. 16:19995
Publication Year :
2008
Publisher :
The Optical Society, 2008.

Abstract

It is very difficult to fabricate tunable optical systems having an aperture below 1000 micrometers with the conventional means on macroscopic scale. Krogmann et al. (J. Opt. A 8, S330-S336, 2006) presented a MEMS-based tunable liquid micro-lens system with an aperture of 300 micrometers. The system exhibited a tuning range of back focal length between 2.3mm and infinity by using the electrowetting effect to change the contact angle of the meniscus shape on silicon with a voltage of 0-45 V. However, spherical aberration was found in their lens system. In the present study, a numerical simulation is performed for this same physical configuration by solving the Young-Laplace equation on the interface of the lens liquid and the surrounding liquid. The resulting meniscus shape produces a back focal length that agrees with the experimental observation excellently. To eliminate the spherical aberration, an electric field is applied on the lens. The electric field alters the Young-Laplace equation and thus changes the meniscus shape and the lens quality. The numerical result shows that the spherical aberration of the lens can be essentially eliminated when a proper electric field is applied.

Details

ISSN :
10944087
Volume :
16
Database :
OpenAIRE
Journal :
Optics Express
Accession number :
edsair.doi.dedup.....168e6a94babdb2a0afcde7c85c57c6b3
Full Text :
https://doi.org/10.1364/oe.16.019995