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Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens
- Source :
- Optics Express. 16:19995
- Publication Year :
- 2008
- Publisher :
- The Optical Society, 2008.
-
Abstract
- It is very difficult to fabricate tunable optical systems having an aperture below 1000 micrometers with the conventional means on macroscopic scale. Krogmann et al. (J. Opt. A 8, S330-S336, 2006) presented a MEMS-based tunable liquid micro-lens system with an aperture of 300 micrometers. The system exhibited a tuning range of back focal length between 2.3mm and infinity by using the electrowetting effect to change the contact angle of the meniscus shape on silicon with a voltage of 0-45 V. However, spherical aberration was found in their lens system. In the present study, a numerical simulation is performed for this same physical configuration by solving the Young-Laplace equation on the interface of the lens liquid and the surrounding liquid. The resulting meniscus shape produces a back focal length that agrees with the experimental observation excellently. To eliminate the spherical aberration, an electric field is applied on the lens. The electric field alters the Young-Laplace equation and thus changes the meniscus shape and the lens quality. The numerical result shows that the spherical aberration of the lens can be essentially eliminated when a proper electric field is applied.
Details
- ISSN :
- 10944087
- Volume :
- 16
- Database :
- OpenAIRE
- Journal :
- Optics Express
- Accession number :
- edsair.doi.dedup.....168e6a94babdb2a0afcde7c85c57c6b3
- Full Text :
- https://doi.org/10.1364/oe.16.019995