Thermoelectric nanogenerator networks: a viable source of power for autonomous wireless sensors

Here we report the design, the elaboration and the measurement of an innovative planar thermoelectric (TE) devices made of large array of suspended nanogenerators [1]. The miniaturized TE generators are arranged in serial and/or in parallel depending on the expected final resistance adapted to the charge. Devices are elaborated using MEMS clean room processes. They can produce enough power (below 100 ¼Watt) to send a signal with common communication protocol and feed basic functions, for example a temperature measurement.