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Anodic bonded 2D semiconductors: from synthesis to device fabrication
- Source :
- Nanotechnology, Nanotechnology, Institute of Physics, 2013, 24 (41), pp.415708. ⟨10.1088/0957-4484/24/41/415708⟩, Nanotechnology, 2013, 24 (41), pp.415708. ⟨10.1088/0957-4484/24/41/415708⟩
- Publication Year :
- 2013
-
Abstract
- International audience; Two-dimensional semiconductors are increasingly relevant for emergent applications and devices, notably for hybrid heterostructures with graphene. We fabricate few-layer, large-area (a few tens of microns across) samples of the III-VI semiconductors GaS, GaSe and InSe using the anodic bonding method and characterize them by simultaneous use of optical microscopy, atomic force microscopy and Raman spectroscopy. Two-terminal devices with a gate are constructed to show the feasibility of applications based on these.
- Subjects :
- GRAPHENE
Materials science
Fabrication
PHASE
GASE
Bioengineering
Nanotechnology
02 engineering and technology
010402 general chemistry
01 natural sciences
law.invention
symbols.namesake
Condensed Matter::Materials Science
Optical microscope
[PHYS.QPHY]Physics [physics]/Quantum Physics [quant-ph]
law
HETEROSTRUCTURES
General Materials Science
CRYSTAL-STRUCTURE
Electrical and Electronic Engineering
Graphene
business.industry
Mechanical Engineering
Transistor
ELECTRONIC-BAND
Heterojunction
General Chemistry
021001 nanoscience & nanotechnology
0104 chemical sciences
RAMAN-SPECTRUM
Semiconductor
Mechanics of Materials
Anodic bonding
INSE
TRANSISTORS
symbols
Optoelectronics
0210 nano-technology
business
Raman spectroscopy
SCANNING PHOTOCURRENT MICROSCOPY
Subjects
Details
- ISSN :
- 13616528 and 09574484
- Volume :
- 24
- Issue :
- 41
- Database :
- OpenAIRE
- Journal :
- Nanotechnology
- Accession number :
- edsair.doi.dedup.....153f6d7fb7a783059689053565825d01
- Full Text :
- https://doi.org/10.1088/0957-4484/24/41/415708⟩