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Anodic bonded 2D semiconductors: from synthesis to device fabrication

Authors :
Zhesheng Chen
Abhay Shukla
Mohamed Boukhicha
Johan Biscaras
Karim Gacem
Institut de minéralogie et de physique des milieux condensés (IMPMC)
Université Pierre et Marie Curie - Paris 6 (UPMC)-IPG PARIS-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS)
Lanzhou Univ, Sch Nucl Sci & Technol
Labex Matisse
ANR-11-IDEX-0004,SUPER,Sorbonne Universités à Paris pour l'Enseignement et la Recherche(2011)
Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Institut de Physique du Globe de Paris (IPG Paris)-Centre National de la Recherche Scientifique (CNRS)
Source :
Nanotechnology, Nanotechnology, Institute of Physics, 2013, 24 (41), pp.415708. ⟨10.1088/0957-4484/24/41/415708⟩, Nanotechnology, 2013, 24 (41), pp.415708. ⟨10.1088/0957-4484/24/41/415708⟩
Publication Year :
2013

Abstract

International audience; Two-dimensional semiconductors are increasingly relevant for emergent applications and devices, notably for hybrid heterostructures with graphene. We fabricate few-layer, large-area (a few tens of microns across) samples of the III-VI semiconductors GaS, GaSe and InSe using the anodic bonding method and characterize them by simultaneous use of optical microscopy, atomic force microscopy and Raman spectroscopy. Two-terminal devices with a gate are constructed to show the feasibility of applications based on these.

Details

ISSN :
13616528 and 09574484
Volume :
24
Issue :
41
Database :
OpenAIRE
Journal :
Nanotechnology
Accession number :
edsair.doi.dedup.....153f6d7fb7a783059689053565825d01
Full Text :
https://doi.org/10.1088/0957-4484/24/41/415708⟩