Parameters Optimization of Process on Different Wavelength Laser Etching of Poly Silicon

Authors :: 朱亮 Zhu Baochun
朱宝春 Han Zhenchun
吕豫文 Zhu Liang
孙铁囤 Sun Tietun
韩振春 Lv Yuwen
冯爱新 Feng Aixin
薛伟 XueWei
裴绍虎 Pei Shaohu
Source :: Applied laser. 33:318-321
Publication Year :: 2013
Publisher :: Shanghai Institute of Optics and Fine Mechanics, 2013.

Subjects :: Materials science
Silicon
business.industry
Hybrid silicon laser
chemistry.chemical_element
Laser etching
Wavelength
chemistry
Etching (microfabrication)
Scientific method
Optoelectronics
Electrical and Electronic Engineering
Reactive-ion etching
business

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