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Studies of large area silicon microstrip sensors
- Source :
- IEEE Transactions on Nuclear Science. 42:437-440
- Publication Year :
- 1995
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 1995.
-
Abstract
- Aiming at future uses in large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and the processes related to such sensors were studied. The fabrication of 4/spl times/8 cm/sup 2/ silicon microstrip sensors on 100 mm wafers has become a routine procedure with a good yield rate. A 4/spl times/64 cm/sup 2/ long ladder, assembled from eight pieces of 4/spl times/8 cm/sup 2/ sensors, has been tested at the CERN SPS area. Test results show that such a detector is feasible. >
- Subjects :
- Nuclear and High Energy Physics
Large Hadron Collider
Materials science
Fabrication
Silicon
business.industry
Detector
chemistry.chemical_element
Particle accelerator
Tracking (particle physics)
Particle detector
law.invention
Semiconductor detector
Nuclear Energy and Engineering
chemistry
law
Optoelectronics
Yield rate
Wafer
Electrical and Electronic Engineering
business
Silicon microstrip detectors
Subjects
Details
- ISSN :
- 15581578 and 00189499
- Volume :
- 42
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Nuclear Science
- Accession number :
- edsair.doi.dedup.....12664c3cabb7afb083380a3d59fbe162
- Full Text :
- https://doi.org/10.1109/23.467805