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Studies of large area silicon microstrip sensors

Authors :
Jyh-Wong Hong
C.H. Lin
E. Chuang
Willis Lin
Hsien-Jen Ting
Yuan-Hann Chang
S.L. Hsu
Su-Wen Hwang
Wen-Chin Tsay
S.R. Hou
Augustine E. Chen
Song-Tsang Chiang
Source :
IEEE Transactions on Nuclear Science. 42:437-440
Publication Year :
1995
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 1995.

Abstract

Aiming at future uses in large silicon tracking devices, 4/spl times/8 cm/sup 2/ silicon microstrip sensors were fabricated, and the processes related to such sensors were studied. The fabrication of 4/spl times/8 cm/sup 2/ silicon microstrip sensors on 100 mm wafers has become a routine procedure with a good yield rate. A 4/spl times/64 cm/sup 2/ long ladder, assembled from eight pieces of 4/spl times/8 cm/sup 2/ sensors, has been tested at the CERN SPS area. Test results show that such a detector is feasible. >

Details

ISSN :
15581578 and 00189499
Volume :
42
Database :
OpenAIRE
Journal :
IEEE Transactions on Nuclear Science
Accession number :
edsair.doi.dedup.....12664c3cabb7afb083380a3d59fbe162
Full Text :
https://doi.org/10.1109/23.467805