Back to Search
Start Over
Interaction of hydrogen with InN thin films elaborated on InP(100)
- Source :
- Surface Science, Surface Science, Elsevier, 2007, 601 (18), pp.3722-3725. ⟨10.1016/j.susc.2007.04.003⟩, Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2007, 601 (18), pp.3722-3725. ⟨10.1016/j.susc.2007.04.003⟩
- Publication Year :
- 2007
- Publisher :
- Elsevier BV, 2007.
-
Abstract
- III–V semiconductor compound structures are widely applied in technology of advanced microelectronics, optoelectronics, and gas sensors. In this paper, we report on the use of XPS to characterize in situ the interaction of thermally activated hydrogen atoms and hydrogen molecules with InP(1 0 0) surfaces covered by thin InN overlayers. XPS spectra were taken with an ESCALAB-210 spectrometer after repeated hydrogenation cycles at temperatures up to 350 °C. The evolution of the In 3d, In 4d, P 2p, N 1s, O 1s and C 1s photoelectron spectra was carefully monitored. The XPS spectra of the hydrogen exposed surface revealed significant differences compared to those from the non-hydrogenated surface. InN films were found to be weakly reactive to hydrogen under experimental conditions explored. The behavior of P atoms at the hydrogenated surface was dependent on the parameters characterizing each hydrogenation (exposure, hydrogen species used, annealing temperature). Moreover, the heavily hydrogenated surface exhibited a phosphorus enrichment.
- Subjects :
- Indium nitride
Hydrogen
Annealing (metallurgy)
Inorganic chemistry
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
01 natural sciences
Spectral line
chemistry.chemical_compound
X-ray photoelectron spectroscopy
0103 physical sciences
Materials Chemistry
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Thin film
ComputingMilieux_MISCELLANEOUS
010302 applied physics
business.industry
Surfaces and Interfaces
Hydrogen atom
021001 nanoscience & nanotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Semiconductor
chemistry
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
0210 nano-technology
business
Subjects
Details
- ISSN :
- 00396028 and 18792758
- Volume :
- 601
- Database :
- OpenAIRE
- Journal :
- Surface Science
- Accession number :
- edsair.doi.dedup.....0f2536502c0c222c253d44e511a17baf