Back to Search
Start Over
Nanostep height measurement via spatial mode projection
- Source :
- Optics Letters, 39 (2), 2014, Recercat. Dipósit de la Recerca de Catalunya, instname, UPCommons. Portal del coneixement obert de la UPC, Universitat Politècnica de Catalunya (UPC)
- Publication Year :
- 2014
- Publisher :
- Optical Society of America, 2014.
-
Abstract
- We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam ’ s spa- tial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one- eightieth ( 1 ∕ 80 ) of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio, which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible
- Subjects :
- Interferometria
Materials science
Scale (ratio)
height measurements
sensors
phase measurement
Optics
nanostructures
Light beam
Sensitivity (control systems)
Projection (set theory)
Subwavelength structures
business.industry
Sensors
Height measurements
Picometre
Phase measurement
interferometry
Atomic and Molecular Physics, and Optics
subwavelength structures
Wavelength
Interferometry
Enginyeria de la telecomunicació::Telecomunicació òptica [Àrees temàtiques de la UPC]
business
Beam (structure)
Subjects
Details
- Language :
- English
- ISSN :
- 01469592
- Database :
- OpenAIRE
- Journal :
- Optics Letters, 39 (2), 2014, Recercat. Dipósit de la Recerca de Catalunya, instname, UPCommons. Portal del coneixement obert de la UPC, Universitat Politècnica de Catalunya (UPC)
- Accession number :
- edsair.doi.dedup.....0b894c25bff6319aacd63f2f74955e8e