Back to Search Start Over

Property control methods of diamond-like silicon-carbon films for micro- and nanoelectronics

Authors :
A.A. Makarov
A.D. Barinov
A.I. Popov
Source :
Scopus-Elsevier
Publication Year :
2019
Publisher :
CAL-TEK srl, 2019.

Subjects

Subjects :
Property (philosophy)
Carbon film
Silicon
chemistry
Nanoelectronics
Computer science
engineering
chemistry.chemical_element
Diamond
Nanotechnology
engineering.material
Control methods

Details

Database :
OpenAIRE
Journal :
THE EUROPEAN MODELING AND SIMULATION SYMPOSIUM
Accession number :
edsair.doi.dedup.....0921b261d74e9cb21ba87e3d58b235c4

Tools

Authors Abstract Subjects Details