Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling

MLA

Hofmann, S., et al. Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling. Jan. 2014. EBSCOhost, https://doi.org/10.48550/arxiv.1401.1014.

APA

Hofmann, S., Liu, Y., Wang, J. Y., & Kovac, J. (2014). Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling. https://doi.org/10.48550/arxiv.1401.1014

Chicago

Hofmann, S., Y. Liu, J. Y. Wang, and J. Kovac. 2014. “Comparison of Analytical and Numerical Resolution Functions in Sputter Depth Profiling,” January. doi:10.48550/arxiv.1401.1014.