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ScAlMgO4: An Oxide Substrate for GaN Epitaxy

Authors :
Theo Siegrist
D. N. E. Buchanan
C. D. Brandle
E. S. Hellman
Igal Brener
G. W. Berkstresser
E. H. Hartford
Lynn Schneemeyer
D. Wiesmann
Source :
MRS Proceedings. 395
Publication Year :
1995
Publisher :
Springer Science and Business Media LLC, 1995.

Abstract

We report the use of ScAlMgO4 as a substrate for the epitaxial growth of wurzitic GaN. The low misfit (+1.8%) allows coherent epitaxy of GaN, as observed by RHEED. The congruent melting of ScAlMgO4 makes Czochralski growth possible, suggesting that large, high quality substrates can be realized. Boules about 17mm in diameter are reported. We have used nitrogen-plasma molecular beam epitaxy to grow GaN epitaxial films onto ScAlMgO4 substrates. Band-gap photoluminescence has been observed from some of these films, depending primarily on the deposition conditions. A 3×3 superstructure has been observed by RHEED on the GaN surfaces. Structural analysis by x-ray diffraction indicates very good in-plane alignment of the GaN films. We also report thermal expansion measurements for ScAlMgO4.

Details

ISSN :
19464274 and 02729172
Volume :
395
Database :
OpenAIRE
Journal :
MRS Proceedings
Accession number :
edsair.doi.dedup.....06b56678a6d14f02af3ec56820f27ece