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Large-Area and High-Quality Epitaxial Graphene on Off-Axis SiC Wafers

Authors :
M. Eddrief
Rachid Belkhou
Mathieu G. Silly
Fausto Sirotti
Claire Mathieu
Abdelkarim Ouerghi
Matthieu Picher
Souliman El Moussaoui
Massimiliano Marangolo
Institut des Nanosciences de Paris (INSP)
Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)
ANR
RTRA Triangle de la Physique
Source :
ACS Nano, ACS Nano, American Chemical Society, 2012, 6 (7), pp.6075-6082. ⟨10.1021/nn301152p⟩, ACS Nano, 2012, 6 (7), pp.6075-6082. ⟨10.1021/nn301152p⟩
Publication Year :
2012
Publisher :
HAL CCSD, 2012.

Abstract

International audience; The growth of large and uniform graphene layers remains very challenging to this day due to the close correlation between the electronic and transport properties and the layer morphology. Here, we report the synthesis of uniform large-scale mono- and bilayers of graphene on off-axis 6H-SiC(0001) substrates. The originality of our approach consists of the fine control of the growth mode of the graphene by precise control of the Si sublimation rate. Moreover, we take advantage of the presence of nanofacets on the off-axis substrate to grow a large and uniform graphene with good long-range order. We believe that our approach represents a significant step toward the scalable synthesis of graphene films with high structural qualities and fine thickness control, in order to develop graphene-based electronic devices.

Details

Language :
English
ISSN :
19360851
Database :
OpenAIRE
Journal :
ACS Nano, ACS Nano, American Chemical Society, 2012, 6 (7), pp.6075-6082. ⟨10.1021/nn301152p⟩, ACS Nano, 2012, 6 (7), pp.6075-6082. ⟨10.1021/nn301152p⟩
Accession number :
edsair.doi.dedup.....05662b67baa281cbc7d92489fcebe494
Full Text :
https://doi.org/10.1021/nn301152p⟩