Back to Search
Start Over
The nanofabrication of polydimethylsiloxane using a focused ion beam
- Source :
- Nanotechnology. 20:145301
- Publication Year :
- 2009
- Publisher :
- IOP Publishing, 2009.
-
Abstract
- Nanofabrication on insulating and flexible films of polydimethylsiloxane (PDMS) using a focused ion beam (FIB) has been illustrated in this study. The charge accumulation effect, which is inevitable in polymeric fabrication, was shown to be relieved by simultaneously introducing electron beam flooding in the area exposed to FIB. The topography of the fabricated pattern is subsequently characterized by using an atomic force microscope (AFM), by which the dependence of height/depth of the fabricated arrays on ion beam dose could be obtained. In addition, the swelling effect and milling effect relating to focused ion beam dose could be identified in this study.
- Subjects :
- Fabrication
Materials science
Ion beam
Polydimethylsiloxane
business.industry
Mechanical Engineering
Bioengineering
Nanotechnology
General Chemistry
Focused ion beam
chemistry.chemical_compound
Nanolithography
Ion beam deposition
chemistry
Mechanics of Materials
Microscopy
Optoelectronics
General Materials Science
Electrical and Electronic Engineering
Electron beam-induced deposition
business
Subjects
Details
- ISSN :
- 13616528 and 09574484
- Volume :
- 20
- Database :
- OpenAIRE
- Journal :
- Nanotechnology
- Accession number :
- edsair.doi.dedup.....04eaec7b0f3d9ce970caecedb63a4f85