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Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range
- Source :
- Journal of Nanoscience and Nanotechnology, Journal of Nanoscience and Nanotechnology, American Scientific Publishers, 2019, 19 (1), pp.546-553. ⟨10.1166/jnn.2019.16474⟩
- Publication Year :
- 2018
-
Abstract
- International audience; This paper presents the first results of systematic studies of beryllium as a material for multilayer mirrors (MLM) and transmission filters (TF) for the EUV spectral range. The objective for the study is the need for the increase in reflectivity and spectral resolution of MLMs for studying the Sun's corona. We investigated Mo/Be (working wavelength is 13.2 nm), Be/Al and Be/Si/Al (17.1 and 30.4 nm) multilayers, as well as free-standing Be films. It was shown that the Be-containing MLMs have significant advantage in reflectivity while their spectral pass-band is similar to beryllium-free MLMs. Observation of the MLMs in the course of 20 months has not revealed any significant decrease in the reflection coefficient. Effect of the silicon interlayers on reflectance of Be/Al MLM is explained. Investigation of a free-standing beryllium filter of the 160 nm thickness showed that its mechanical strength is approximately at the same level as that of the aluminum filter with the same thickness. There is also high stability of the transmittance.
- Subjects :
- Materials science
Silicon
Extreme ultraviolet lithography
Biomedical Engineering
chemistry.chemical_element
Bioengineering
02 engineering and technology
Optics
Multilayer Design
Transmittance
General Materials Science
Spectral resolution
Reflection coefficient
business.industry
General Chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
Wavelength
chemistry
Multilayers
Extreme ultraviolet
X-ray Mirrors
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Space Optics
Beryllium
0210 nano-technology
business
Subjects
Details
- ISSN :
- 15334880
- Volume :
- 19
- Issue :
- 1
- Database :
- OpenAIRE
- Journal :
- Journal of nanoscience and nanotechnology
- Accession number :
- edsair.doi.dedup.....03921593ffe0d1ac61cdbca54c5cbf2c
- Full Text :
- https://doi.org/10.1166/jnn.2019.16474⟩