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Biological and material science applications of EUV and SXR nanoscale imaging systems based on double stream gas puff target laser plasma sources
- Source :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Publication Year :
- 2017
-
Abstract
- In the last 30 years much effort was made in order to develop compact laser-produced plasma sources emitting short wavelength radiation, from the soft X-ray (SXR, λ = 0.1–10 nm), especially in the so-called “water window” (λ = 2.3–4.4 nm) and in the extreme ultraviolet (EUV, λ = 10–120 nm) spectral ranges. Investigations in the nanometer scale, employing short wavelengths, drive the need for developing table-top microscopes, to overpass the limitations imposed by large facilities, such as their high complexity, maintenance costs and the limited user access. In this paper we present our recent results related to nanoscale imaging using such table-top and desk-top EUV/SXR microscopes. Their construction is based on a double stream gas puff target laser plasma source. The double stream gas puff target EUV and SXR sources, coupled with Fresnel zone plates (FZPs) represent a suitable platform for microscopy experiments in transmission mode, employing SXR and EUV radiation. It represents a possible complementary technique to synchrotrons and free-electron laser facilities. The sources, which are very easy to be used by a single user, allow for efficient generation of plasma radiation with high SXR/EUV flux. Presented herein compact microscopes, based on that source, allow one to capture SXR and EUV images of various samples, with 50–60 nm half-pitch spatial resolution (corresponding to a Rayleigh resolution of 100–120 nm) and exposure time of the order of few seconds. Thus, herein, we would like to present our recent developments and progress in compact desk-top SXR/EUV microscopy employing laser plasma gas puff target sources, showing examples of acquired images and possible applications.
- Subjects :
- Nuclear and High Energy Physics
Nanometer resolution
Microscope
Fresnel zone
Extreme ultraviolet lithography
02 engineering and technology
01 natural sciences
law.invention
Imaging
010309 optics
Fresnel zone plate
Optics
law
0103 physical sciences
Instrumentation
Image resolution
Water window
EUV/SXR microscopy
business.industry
Chemistry
Plasma
021001 nanoscience & nanotechnology
Laser
Extreme ultraviolet
Gas puff target
0210 nano-technology
business
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Accession number :
- edsair.doi.dedup.....00cb2d8236640c739b0975c8bdecd6ea