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Investigation of the Transverse Spread of Erbium Ions Implanted in SOI

Authors :
Panpan Jiao
Qiao Zhuang
Jinhua Zhao
Xiaodi Lu
Xifeng Qin
Source :
Proceedings of the 2018 2nd International Conference on Artificial Intelligence: Technologies and Applications (ICAITA 2018).
Publication Year :
2018
Publisher :
Atlantis Press, 2018.

Subjects

Subjects :
Transverse plane
Ion implantation
business.industry
Computer science
Optoelectronics
Silicon on insulator
business
Erbium ions

Details

Database :
OpenAIRE
Journal :
Proceedings of the 2018 2nd International Conference on Artificial Intelligence: Technologies and Applications (ICAITA 2018)
Accession number :
edsair.doi...........fff3fbaa08580d43459a1bdf39ad2a42
Full Text :
https://doi.org/10.2991/icaita-18.2018.31
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