Influence of substrate temperature on the structural and optoelectronic properties of ZnMgO:Al coatings deposited by radio frequency magnetron sputtering

Authors :: Erh-Chiang Chen
Bing-Hau Kuo
Du-Cheng Tsai
Yen-Lin Huang
Zue-Chin Chang
Fuh-Sheng Shieu
Feng-Kuan Chen
Source :: Journal of the Ceramic Society of Japan. 129:714-719
Publication Year :: 2021
Publisher :: Ceramic Society of Japan, 2021.

Subjects :: Materials science
business.industry
Materials Chemistry
Ceramics and Composites
Optoelectronics
General Chemistry
Substrate (printing)
Radio frequency magnetron sputtering
Condensed Matter Physics
business

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