Microstructural properties of laser synthesized Si/C/N nanoparticles

Microstructural properties of nanosized particles produced by CO 2 laser synthesis from gaseous precursors, are studied by different techniques. Results on the characterization of binary (SiC and Si 3 N 4 ) and ternary (Si/C/N) ultrafine powders are presented. The evolution of the chemical composition and microstructure, after heat treatments in different atmospheres, is investigated in order to study and to improve the stability of these materials.