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STM Crolles TPM deployments and success story

Authors :
C. Ribes
Source :
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072).
Publication Year :
2002
Publisher :
IEEE, 2002.

Abstract

The STMicroelectronics facility at Crolles develops and volume produces ASICs for CMOS and BICMOS processes on 200 mm wafers for technologies down to 0.12 /spl mu/m. Given the wide range of products and processes, a high degree of manufacturing flexibility is required. A large-scale TPM (Total Productive Manufacturing) program was introduced in 1992 based on a comprehensive manufacturing strategy to improve equipment productivity.

Details

Database :
OpenAIRE
Journal :
2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072)
Accession number :
edsair.doi...........fdf81f61442e64190f36274d558c767f
Full Text :
https://doi.org/10.1109/asmc.2000.902626