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STM Crolles TPM deployments and success story
- Source :
- 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- The STMicroelectronics facility at Crolles develops and volume produces ASICs for CMOS and BICMOS processes on 200 mm wafers for technologies down to 0.12 /spl mu/m. Given the wide range of products and processes, a high degree of manufacturing flexibility is required. A large-scale TPM (Total Productive Manufacturing) program was introduced in 1992 based on a comprehensive manufacturing strategy to improve equipment productivity.
Details
- Database :
- OpenAIRE
- Journal :
- 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072)
- Accession number :
- edsair.doi...........fdf81f61442e64190f36274d558c767f
- Full Text :
- https://doi.org/10.1109/asmc.2000.902626