POST ILLUMINATION ANNEALING OF DEFECTS IN LASER-PROCESSED SILICON

MLA

S. D. Ferris, et al. Post Illumination Annealing of Defects in Laser-Processed Silicon. Jan. 1980. EBSCOhost, https://doi.org/10.1016/b978-0-12-746850-1.50064-5.

APA

S. D. Ferris, Lionel C. Kimerling, George K. Celler, J. L. Benton, C. J. Doherty, & Harry J. Leamy. (1980). Post Illumination Annealing of Defects in Laser-Processed Silicon. https://doi.org/10.1016/b978-0-12-746850-1.50064-5

Chicago

S. D. Ferris, Lionel C. Kimerling, George K. Celler, J. L. Benton, C. J. Doherty, and Harry J. Leamy. 1980. “Post Illumination Annealing of Defects in Laser-Processed Silicon,” January. doi:10.1016/b978-0-12-746850-1.50064-5.