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Varifocal-Piston Micromirror With Quasi-Simply Supported Piecewise Linear Flexure
- Source :
- IEEE Journal of Selected Topics in Quantum Electronics. 28:1-8
- Publication Year :
- 2022
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2022.
- Subjects :
- Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Subjects
Details
- ISSN :
- 15584542 and 1077260X
- Volume :
- 28
- Database :
- OpenAIRE
- Journal :
- IEEE Journal of Selected Topics in Quantum Electronics
- Accession number :
- edsair.doi...........fd1f50d6b08877baea30055a38825ba0