A Combination of Ion Implantation and High‐Temperature Annealing: Donor–Acceptor Pairs in Carbon‐Implanted AlN

Authors :: Lukas Peters
Hendrik Spende
Stefan Wolter
Christoph Margenfeld
Carsten Ronning
Tobias Voss
Andreas Waag
Source :: physica status solidi (a).
Publication Year :: 2023
Publisher :: Wiley, 2023.

Subjects :: Materials Chemistry
Surfaces and Interfaces
Electrical and Electronic Engineering
Condensed Matter Physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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