Multilayer Pb(Zr,Ti)O3Thin Films for Ultrasonic Transducer

Authors :: Takayuki Fujita
Kazusuke Maenaka
Kensuke Kanda
Ryo Sano
Shoma Nakamoto
Source :: Electronics and Communications in Japan. 101:63-68
Publication Year :: 2018
Publisher :: Wiley, 2018.

Subjects :: 010302 applied physics
Microelectromechanical systems
Materials science
Computer Networks and Communications
Applied Mathematics
General Physics and Astronomy
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
0103 physical sciences
Signal Processing
PMUT
Ultrasonic sensor
Electrical and Electronic Engineering
Thin film
Composite material
0210 nano-technology

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