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Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

Authors :
Shun Min Wang
S. W. Liang
Yung Huang Chang
Chih Chen
Jia-Min Shieh
Ching Jung Yang
Source :
Applied Physics Letters. 90:033104
Publication Year :
2007
Publisher :
AIP Publishing, 2007.

Abstract

Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250°C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a blue∕green luminescence at 480nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5Vμm−1 and a threshold electric field of 9.8Vμm−1, which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate.

Details

ISSN :
10773118 and 00036951
Volume :
90
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........fc41e406b5ff9a74a585f77b70e50879
Full Text :
https://doi.org/10.1063/1.2431786