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Detection of Characteristic Signals from As-Doped (less than 1 at.%) Regions of Silicon by Transmission Electron Microscopy and Convergent-beam Electron Diffraction
- Source :
- Microscopy and Microanalysis. 10:338-339
- Publication Year :
- 2004
- Publisher :
- Oxford University Press (OUP), 2004.
-
Abstract
- Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
- Subjects :
- Conventional transmission electron microscope
Reflection high-energy electron diffraction
Materials science
Electron tomography
business.industry
Scanning transmission electron microscopy
Scanning confocal electron microscopy
Energy filtered transmission electron microscopy
Optoelectronics
Electron beam-induced deposition
business
Instrumentation
Kikuchi line
Subjects
Details
- ISSN :
- 14358115 and 14319276
- Volume :
- 10
- Database :
- OpenAIRE
- Journal :
- Microscopy and Microanalysis
- Accession number :
- edsair.doi...........fc0de64c96c9c3164d28b6d8de6b91b0
- Full Text :
- https://doi.org/10.1017/s1431927604883958