Communication—Defect-Free Filling of High Aspect Ratio Through Vias in Ultrathin Glass

Subjects

Subjects :

Materials science
Renewable Energy, Sustainability and the Environment
business.industry
020209 energy
010401 analytical chemistry
Defect free
02 engineering and technology
Condensed Matter Physics
01 natural sciences
0104 chemical sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
0202 electrical engineering, electronic engineering, information engineering
Materials Chemistry
Electrochemistry
Optoelectronics
business

Details

ISSN :

19457111 and 00134651

Volume :

166

Database :

OpenAIRE

Journal :

Journal of The Electrochemical Society

Accession number :

edsair.doi...........fbae8aa5be1e7a7a8897c38eac04f009

Full Text :

https://doi.org/10.1149/2.0181901jes