Electron beam induced deposition of residual hydrocarbons in the presence of a multiwall carbon nanotube

Amorphous carbon deposited via electron beam induced deposition (EBID) is frequently used to make a low-temperature Ohmic contact with low electrical resistance and improved mechanical characteristics of the multiwall nanotube (MWNT) substrate or MWNT-MWNT interface. However, influence of the MWNT on the EBID process has not been quantified. In this work, we experimentally and theoretically investigate the growth dynamics of EBID of residual hydrocarbons in presence of a MWNT. We demonstrate that the properties of MWNT do not impact amorphous carbon deposition process.