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Thermal stability of atomic layer deposition Al2O3film on HgCdTe

Authors :
P. Zhang
Changhong Sun
Y. Zhang
X. Chen
Y. Y. Chen
Zhenhua Ye
Source :
SPIE Proceedings.
Publication Year :
2015
Publisher :
SPIE, 2015.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........fb2d4ab93f8f7221b264623cc4cd79de

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