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Interfacial-Layer Design for Hf1-xZrxO2-Based FTJ Devices: From Atom to Array

Authors :
H. -L. Chiang
J.-F. Wang
K. -H. Lin
C.-H. Nien
J. -J. Wu
K.-Y. Hsiang
C. -P. Chuu
Y.-W. Chen
X. W. Zhang
C. W. Liu
Tahui Wang
C. -C. Wang
M.-H. Lee
M. -F. Chang
C.-S. Chang
T. C. Chen
Source :
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
Accession number :
edsair.doi...........fb1b443bd9f78e3c077d8c5a27f76bde

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