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Research on Heating Uniformity of MOCVD Heating Device
- Source :
- Chinese Journal of Luminescence. 38:220-225
- Publication Year :
- 2017
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2017.
Details
- ISSN :
- 10007032
- Volume :
- 38
- Database :
- OpenAIRE
- Journal :
- Chinese Journal of Luminescence
- Accession number :
- edsair.doi...........fadd482b40073d0288e8925ea0ca660f
- Full Text :
- https://doi.org/10.3788/fgxb20173802.0220