Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Authors :: Rachel A. Nye
Kaat Van Dongen
Danilo De Simone
Hironori Oka
Gregory N. Parsons
Annelies Delabie
Source :: Chemistry of Materials. 35:2016-2026
Publication Year :: 2023
Publisher :: American Chemical Society (ACS), 2023.

Subjects :: General Chemical Engineering
Materials Chemistry
General Chemistry

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