Vibration Control Evaluation of Micro Smart Structures with Non-Contact Laser Excitation

Smart structures technology that uses piezoelectric element etc. is effective for the vibration control of small devices. However, for micro devices, it is difficult to experimentally measure and evaluate the vibration control characteristics of the system due to its microscopic scale. Namely, it is not realistic to install an external exciter or to apply the excitation force with an impulse hammer. Therefore, in this study, the vibration property is measured and evaluated by using the non-contact excitation/measurement technology using laser ablation for the excitation and laser Doppler vibrometer for the measurement. Since both input excitation and output measurement are made without contact of apparatus and the excitation force has a high reproducibility in the present system, the efficiency and the reliability of the measurement can be improved.