Back to Search Start Over

The Synthesis of the High Resolution i Line Novolak Resist

Authors :
Atsushi Sekiguchi
Makoto Hanabata
Hiroko Minami
Yoko Matsumoto
Yosuke Ohta
Fucheng Wang
Martin Z Ma
Zhiqiang Su
Source :
Journal of Photopolymer Science and Technology. 35:327-335
Publication Year :
2022
Publisher :
Technical Association of Photopolymers, Japan, 2022.

Details

ISSN :
13496336 and 09149244
Volume :
35
Database :
OpenAIRE
Journal :
Journal of Photopolymer Science and Technology
Accession number :
edsair.doi...........f98009d72d1681100bd5a0db4d822f44
Full Text :
https://doi.org/10.2494/photopolymer.35.327