An Overview of MEMS Testing Technologies

This paper is to concentrate on the methods of MEMS devices modeling and testing. This problem is urgent due to a MEMS device's miniaturized scales and high quality constraints. In the case of insufficient models of MEMS devices, a low quality product is supposed to be fabricated, resulting in necessity to be reconstructed and, thus, longer time and greater costs of production. As it has been made transparent, advanced CAD and mechanical tools are needed to enable testing of a MEMS device on all the stages of its production, from material usage and right till environmental effects upon the work of the device constructed. As an example, the fabrication of a bandpass filter will be considered. Each stage of the process will involve yet another type of testing and simulation. In the second part of the paper the main stages of the filter design will be considered, including the approaches to optimization striving towards specifications maximal match