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DRAM Wafer Qualification Issues: Oxide Integrity vs. D-Defects, Oxygen Precipitates and High Temperature Annealing

Authors :
Jea-Gun Park
George A. Rozgonyi
Source :
Solid State Phenomena. :327-352
Publication Year :
1995
Publisher :
Trans Tech Publications, Ltd., 1995.

Subjects

Subjects :
chemistry.chemical_compound
Materials science
Oxygen precipitates
chemistry
Annealing (metallurgy)
Metallurgy
Oxide
General Materials Science
Wafer
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Dram

Details

ISSN :
16629779
Database :
OpenAIRE
Journal :
Solid State Phenomena
Accession number :
edsair.doi...........f70baf39e26f8fe2512e45ba62b07d5c

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