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EUV Photochemistry of α-Substituted Antimony Carboxylate Complexes

Authors :
Maximilian Weires
Nitinkumar S. Upadhyay
Michael C. Murphy
Robert L. Brainard
Philip Schuler
Shaheen Hasan
Greg Denbeaux
Source :
Journal of Photopolymer Science and Technology. 34:81-86
Publication Year :
2021
Publisher :
Technical Association of Photopolymers, Japan, 2021.

Subjects

Subjects :
chemistry.chemical_compound
Materials science
Polymers and Plastics
Antimony
chemistry
Extreme ultraviolet lithography
Organic Chemistry
Materials Chemistry
chemistry.chemical_element
Carboxylate
Photochemistry

Details

ISSN :
13496336 and 09149244
Volume :
34
Database :
OpenAIRE
Journal :
Journal of Photopolymer Science and Technology
Accession number :
edsair.doi...........f6e2dd0bd13054ea796cb4606042dffc
Full Text :
https://doi.org/10.2494/photopolymer.34.81
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