Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests

Authors :: M. Ferrera
Alberto Corigliano
F. Cacchione
Sarah Zerbini
Attilio Frangi
Source :: Advances in Multiphysics Simulation and Experimental Testing of Mems
Publication Year :: 2008
Publisher :: PUBLISHED BY IMPERIAL COLLEGE PRESS AND DISTRIBUTED BY WORLD SCIENTIFIC PUBLISHING CO., 2008.

Subjects :: Materials science
Scale (ratio)
Mechanical engineering
Characterization (materials science)

Database :: OpenAIRE
Journal :: Advances in Multiphysics Simulation and Experimental Testing of Mems
Accession number :: edsair.doi...........f5fe2527077e63deaddca56c5fdaaf32

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