Back to Search
Start Over
EUV radiation from pinching discharges of magnetoplasma compressor type and its dependence on the dynamics of compression zone formation
- Source :
- Physica Scripta. :014037
- Publication Year :
- 2014
- Publisher :
- IOP Publishing, 2014.
-
Abstract
- This paper is devoted to the investigation of plasma stream parameters and the intensity of extreme ultraviolet (EUV) radiation from the compression zone in various modes of operation of a magnetoplasma compressor (MPC). Two gases of different masses, either helium or argon, were used for the ignition of MPC discharge under the residual pressure. The plasma stream density along the axis and the EUV radiation energy were measured. It was shown that the compression zone position depends on the initial density of the residual gas. The EUV radiation energy was measured with a calibrated AXUV in the wavelength range of 12.2–15.8 nm. It was revealed that the radiation energy increased by 30–50% with decreasing initial gas pressure.
- Subjects :
- Physics
Argon
Extreme ultraviolet lithography
chemistry.chemical_element
Radiant energy
Plasma
Radiation
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
chemistry
Physics::Plasma Physics
Extreme ultraviolet
Physics::Space Physics
Atomic physics
Gas compressor
Mathematical Physics
Helium
Subjects
Details
- ISSN :
- 14024896 and 00318949
- Database :
- OpenAIRE
- Journal :
- Physica Scripta
- Accession number :
- edsair.doi...........f5a5b022accaf2b6fd203a5cc6718144
- Full Text :
- https://doi.org/10.1088/0031-8949/2014/t161/014037