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Highly improved passivation of PECVD p-type TOPCon by suppressing plasma-oxidation ion-bombardment-induced damages

Highly improved passivation of PECVD p-type TOPCon by suppressing plasma-oxidation ion-bombardment-induced damages

Authors :
Dian Ma
Wei Liu
Mingjing Xiao
Zhenhai Yang
Zunke Liu
Mingdun Liao
Qingling Han
Hao Cheng
Haiyang Xing
Zetao Ding
Baojie Yan
Yude Wang
Yuheng Zeng
Jichun Ye
Source :
Solar Energy. 242:1-9
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Details

ISSN :
0038092X
Volume :
242
Database :
OpenAIRE
Journal :
Solar Energy
Accession number :
edsair.doi...........f5912d1d3d73d643979dea1ee2e30a26
Full Text :
https://doi.org/10.1016/j.solener.2022.07.003