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氮化硅集成微腔光频梳器件关键制备技术(特邀)
- Source :
- Infrared and Laser Engineering. 51:20220214
- Publication Year :
- 2022
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2022.
Details
- ISSN :
- 10072276
- Volume :
- 51
- Database :
- OpenAIRE
- Journal :
- Infrared and Laser Engineering
- Accession number :
- edsair.doi...........f5018f89c518e66d0552a3e79e0935b5