Composition-dependent crystallization of alternative gate dielectrics

MLA

Theo Siegrist, et al. “Composition-Dependent Crystallization of Alternative Gate Dielectrics.” Applied Physics Letters, vol. 83, Aug. 2003, pp. 1459–61. EBSCOhost, https://doi.org/10.1063/1.1603341.

APA

Theo Siegrist, R. B. van Dover, L. Manchanda, Martin L. Green, & Lynn Schneemeyer. (2003). Composition-dependent crystallization of alternative gate dielectrics. Applied Physics Letters, 83, 1459–1461. https://doi.org/10.1063/1.1603341

Chicago

Theo Siegrist, R. B. van Dover, L. Manchanda, Martin L. Green, and Lynn Schneemeyer. 2003. “Composition-Dependent Crystallization of Alternative Gate Dielectrics.” Applied Physics Letters 83 (August): 1459–61. doi:10.1063/1.1603341.