Nonlinear mathematical model for a biaxial MOEMS scanning mirror

In this paper, a nonlinear mathematic model for Microvision's MOEMS scanning mirror is presented. The pixel placement accuracy requirement for scanned laser spot displays translates into a roughly 80dB signal to noise ratio, noise being a departure from the ideal trajectory. To provide a tool for understanding subtle nonidealities, a detailed nonlinear mathematical model is derived, using coefficients derived from physics, finite element analysis, and experiments. Twelve degrees of freedom parameterize the motion of a gimbal plate and a suspended micromirror; a thirteenth is the device temperature. Illustrations of the application of the model to capture subtleties about the device dynamics and transfer functions are presented.